X-ray and luminescent analysis of finely dispersed β-FeSi2 films formed in Si by pulsed ion-beam treatment

Physics of the Solid State

Volumn 43, Issue 9, 2001, Pages 1633-1636

  Bayazitov, R M ^a   Batalov, R I ^a   Terukov, E I ^b   Kudoyarova, V Kh ^b  

^a ZAVOISKY PHYSICAL TECHNICAL INSTITUTE   (Russian Federation)

^b IOFFE INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035457661     PISSN: 10637834     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1402214     Document Type: Article

References (21)

1. G. Franzo, F. Priolo, S. Coffa, et al., Appl. Phys. Lett. 64, 2235 (1994).
2. W. Fuhs, I. Ulber, G. Weiser, et al., Phys. Rev. B 56, 9545 (1997).
3. A. Reittinger, J. Stimmer, and G. Abstreiter, Appl. Phys. Lett. 70, 2431 (1997).
4. H. Katsumata, Y. Makita, N. Kobayashi, et al., J. Appl. Phys. 80, 5955 (1996).
5. K. J. Reeson, M. S. Finney, M. A. Harry, et al., Nucl. Instrum. Methods Phys. Res. B 106, 364 (1995).
6. M. G. Grimaldi, S. Coffa, C. Spinella, et al., J. Lumin. 80, 467 (1998).
7. C. Spinella, S. Coffa, C. Bongiorno, et al., Appl. Phys. Lett. 76, 173 (2000).
8. K. P. Homewood, K. J. Reeson, R. M. Gwilliam, et al., Thin Solid Films 381, 188 (2001).
9. K. Oyoshi, D. Lenssen, R. Carius, and S. Mantl, Thin Solid Films 381, 194 (2001); 381, 202 (2001).
10. K. Oyoshi, D. Lenssen, R. Carius, and S. Mantl, Thin Solid Films 381, 194 (2001); 381, 202 (2001).
11. T. Suemasu, Y. Iikura, K. Takakura, and F. Hasegawa, J. Lumin. 87-89, 528 (2000).
12. T. Suemasu, Y. Negishi, K. Takakura, and F. Hasegawa, Jpn. J. Appl. Phys. 39, L1013 (2000).
13. B. O. Kolbesen and H. Cerva, Phys. Status Solidi B 222, 303 (2000).
14. R. Hodgson, J. E. E. Baglin, R. Pal, et al., Appl. Phys. Lett. 37, 187 (1980).
15. L. J. Chen, L. S. Hung, J. W. Mayer, et al., Appl. Phys. Lett. 40, 595 (1982).
16. R. M. Bayazitov, L. Kh. Zakirzyanova, I. B. Khaibullin, et al., Vacuum 43, 619 (1992).
17. R. M. Bayazitov, L. Kh. Antonova, I. B. Khaibullin, and G. E. Remnev, Nucl. Instrum. Methods Phys. Res. B 139, 418 (1998).
18. R. M. Bayazitov and R. I. Batalov, J. Phys.: Condens. Matter 13, L113 (2001).
19. M. Ferrari and L. Lutterotti, J. Appl. Phys. 76, 7246 (1994).
20. N. A. Drozdov, A. A. Patrin, and V. D. Tkachev, Pis'ma Zh. Éksp. Teor. Fiz. 23 (11), 651 (1976) [JETP Lett. 23, 597 (1976)].
21. N. A. Drozdov, A. A. Patrin, and V. D. Tkachev, Pis'ma Zh. Éksp. Teor. Fiz. 23 (11), 651 (1976) [JETP Lett. 23, 597 (1976)].