SCOPUS 정보 검색 플랫폼

Surface Science

Volumn 490, Issue 1-2, 2001, Pages

Si(113) hydrogen desorption kinetics: A temperature programmed desorption study

(3) Kim, H a Spila, T a Greene, J E a

a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN (United States)

Author keywords

Deuterium; Low energy electron diffraction (LEED); Silicon; Thermal desorption spectroscopy

Indexed keywords

ACTIVATION ENERGY; DESORPTION; INTERFACIAL ENERGY; LOW ENERGY ELECTRON DIFFRACTION; MOLECULAR BEAM EPITAXY; SILICON WAFERS; TEMPERATURE PROGRAMMED DESORPTION;

THERMAL DESORPTION SPECTROSCOPY;

SURFACE STRUCTURE;

EID: 0035451505 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/S0039-6028(01)01340-1 Document Type: Article

Times cited : (8)

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