Effects of B doping on hydrogen desorption from Si(001) during gas-source molecular-beam epitaxy from Si2H6 and B2H6

Applied Physics Letters

Volumn 69, Issue 25, 1996, Pages 3869-3871

  Kim, H ^a   Glass, G ^a   Park, S Y ^a   Spila, T ^a   Taylor, N ^a   Abelson, J R ^a   Greene, J E ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001188149     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117132     Document Type: Article

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