Structure of the Si(011)-(16 × 2) surface and hydrogen desorption kinetics investigated using temperature-programmed desorption

Surface Science

Volumn 380, Issue 2-3, 1997, Pages

  Kim, H ^a   Taylor, N ^a   Spila, T ^a   Glass, G ^a   Park, S Y ^a   Greene, I E ^a   Abelson, J R ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

Adatoms; Deuterium; Silicon; Surface relaxation and reconstruction; Thermal desorption spectroscopy

Indexed keywords

ATOMS; DEUTERIUM; REACTION KINETICS; SATURATION (MATERIALS COMPOSITION); SURFACE STRUCTURE; TEMPERATURE PROGRAMMED DESORPTION; THERMAL EFFECTS;

SURFACE RELAXATION; THERMAL DESORPTION SPECTROSCOPY;

SILICON;

EID: 0031142925     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(96)01587-7     Document Type: Article

References (26)

1. F. Jona, IBM J. Res. Dev. 9 (1965) 375.
2. T. Ichinokawa, H. Ampo, S. Miura and A. Tamura, Phys. Rev. B 31 (1985) 5183.
3. E.J. van Loenen, D. Dijkkamp and A.J. Hoeven, J. Microsc. 152 (1988) 487.
4. H. Neddermeyer and S. Tosch, Phys. Rev. B 38 (1988) 5784.
5. H. Ampo, S. Miura, K. Kato. Y. Ohkawa and A. Tamura, Phys. Rev. B 34 (1986) 2329.
6. Y. Yamamoto, Phys. Rev. B 50 (1994) 8534.
7. R.S. Becker, B.S. Swartzentruber and J.S. Vickers, J. Vac. Sci. Technol. A 6 (1988) 427.
8. E.G. Keim, H. Wormeester and A. van Silfhout, J. Vac. Sci. Technol. A 8 (1990) 2747.
9. A.I. Shkrebtii, C.M. Bertoni, R. Del Sole and B.A. Nesterenko, Surf. Sci. 239 (1990) 227.
10. B.A. Nesterenko and A.I. Shkrebtti, Surf. Sci. 213 (1989) 309.
11. B.A. Nesterenko, Appl. Surf. Sci. 33/34 (1988) 21.
12. C.W. Liu, J.C. Sturm, Y.K. Lacroix, M.E.W. Thewalt and D.D. Perovic, Appl. Phys. Lett. 65 (1994) 76.
13. T.L. Kreifels, R.L. Hengehold, Y.K. Yeo, P.E. Thomson and D.S. Simons, J. Vac. Sci. Technol. A 13 (1995) 636.
14. H. Kim, G. Glass, S.Y. Park, T. Spila, N. Taylor, J.R. Abelson and J.E. Greene, Appl. Phys. Lett. 69 (1996) 3869.
15. Q. Lu, T.R. Bramblett, N.-E. Lee, M.-A. Hasan, T. Karasawa and J.E. Greene, J. Appl. Phys. 77 (1995) 3067.
16. X.-J. Zhang, G. Xue, A. Agarwal, R. Tsu, M.-A. Hasan, J.E. Greene and A. Rockett, J. Vac. Sci. Technol. A 11 (1993) 2553.
17. T. Sakurai and H.D. Hagstrum, Phys. Rev. B 12 (1975) 5349.
18. B.G. Kohler, C.H. Mak, D.A. Arthur, P.A. Coon and S.M. George, J. Chem. Phys. 89 (1988) 1709.
19. M.C. Flowers, N.B.H. Jonathan, Y. Liu and A. Morris, J. Chem. Phys. 102 (1995) 1034.
20. K. Takayanagi, Y. Tanioshiro, M. Takahashi and S. Takahashi, J. Vac. Sci. Technol. A 3 (1985) 1502.
21. J.J. Boland, Surf. Sci. 244 (1991) 1.
22. P.A. Redhead, Vacuum 12 (1962) 203.
23. F.M. Lord and J.S. Kittelberger, Surf. Sci. 43 (1974) 173.
24. T. Ichikawa, T. Sueyosi, Y. Sato, M. Iwatsuki, F. Udagawa and I. Sumita, Solid State Commun. 93 (1995) 541.
25. M.C. Flowers, N.B.H. Jonathan, Y. Liu and A. Morris, J. Chem. Phys. 99 (1993) 7038; P. Gupta, V.L. Calvin and S.M. George, Phys. Rev. B 39 (1988) 8234.
26. M.C. Flowers, N.B.H. Jonathan, Y. Liu and A. Morris, J. Chem. Phys. 99 (1993) 7038; P. Gupta, V.L. Calvin and S.M. George, Phys. Rev. B 39 (1988) 8234.