Mask-membrane impact on image blur in SCALPEL

Microelectronic Engineering

Volumn 57-58, Issue , 2001, Pages 277-284

  Mkrtchyan, M ^a   Gallatin, G ^a   Liddle, A ^a   Zhu, X ^a   Munro, E ^a   Waskiewicz, W ^a   Muller, D ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

Chromatic aberration; Electron scattering; Energy loss; Plasmon generation

Indexed keywords

ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON SCATTERING; ELECTRONS; ENERGY DISSIPATION; MASKS; MEMBRANES;

MASK-MEMBRANES; PLASMON GENERATION;

THIN FILMS;

EID: 0035450020     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00524-X     Document Type: Article

References (7)