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Volumn 3777, Issue , 1999, Pages 215-227
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Simulation of discrete Coulomb interactions in high-current projection and multi-beam columns
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Author keywords
[No Author keywords available]
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Indexed keywords
ABERRATIONS;
ALGORITHMS;
CATHODES;
CHARGED PARTICLES;
COMPUTER SIMULATION;
ELECTRON BEAM LITHOGRAPHY;
FINITE ELEMENT METHOD;
ION BEAM LITHOGRAPHY;
MONTE CARLO METHODS;
OPTICAL INSTRUMENT LENSES;
OPTICAL SYSTEMS;
PARTICLE OPTICS;
CHARGE PARTICLE OPTICS;
COULOMB INTERACTIONS;
ELECTRON LENS ABBERATION;
MULTI BEAM COLUMNS;
N-BODY PROBLEM METHOD;
NEXT GENERATION LITHOGRAPHY;
PROJECTION SYSTEM OPTICS;
ELECTROSTATICS;
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EID: 0033331815
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (15)
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References (11)
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