Electron scattering and transmission through SCALPEL masks

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3385-3391

  Mkrtchyan, M M ^a   Liddle, J A ^a   Novembre, A E ^a   Waskiewicz, W K ^a   Watson, G P ^a   Harriott, L R ^a   Muller, D A ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000474090     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590464     Document Type: Article

References (27)

1. J. A. Liddle, H. A. Muggins, S. D. Berger, J. M. Gibson, G. Weber, R. Kola, and C. W. Jurgensen, J. Vac. Sci. Technol. B 9, 3000 (1991).
2. R. A. Farrow, A. E. Novembre, M. L. Peabody, R. Kasica, M. Blakey, J. A. Liddle, K. S. Werder, R. Demarco, L. Ocola, L. Rutberg, T. Saunders, M. Smith, J. Unruh, and F. Qian, J. Vac. Sci. Technol. B (these proceeding).
3. K. A. Valiev, The Physics of Submicron Lithography (Plenum, New York, 1992).
4. L. Reimer, Transmission Electron Microscopy, Physics of Image Formation. and Microanalysis (Springer, Berlin, 1989).
5. R. F. Egerton, Electron Energy-Loss Spectroscopy in The Electron Microscopy (Plenum, New York, 1996).
6. K. Wong and R. F. Egerton, J. Microsc. 158, 198 (1995)
7. G. H. Smith and R. E. Burge, Proc. Phys. Soc. London 81, 612 (1963).
8. J. P. Langmore, J. Wall, and M. Isaacson, Optik (Stuttgart) 38, 335
9. H. Z. Fleishmann, Z. Naturforsch. A 15, 1090 (1960).
10. D. T. Cromer and J. T. Waber, Acta Crystallogr. 18, 104 (1965).
11. M. Fink and J. Kessler, J. Chem. Phys. 47, 1780 (1967).
12. J. S. Halliday, Br. J. Appl. Phys. 11, 259 (1960).
13. F. Lenz, Z. Naturforsch. Teil A 9, 185 (1954).
14. R. J. Hawryluk, A. M. Hawryluk, and H. I. Smith, J. Appl. Phys. 45, 2551 (1974).
15. H. S. W. Massey, Adv. Opt. Electron. Microsc. 4, 2 (1952).
16. H. A. Bethe, Phys. Rev. 89, 1256 (1953).
17. W. T. Scott, Rev. Mod. Phys. 35, 231 (1963).
18. K. Murata D. Kyser, and C. Ting, J. Appl. Phys. 52, 4396 (1981).
19. G. Moliere, Z. Naturforsch. A 2, 133 (1947); 3, 78 (1948).
20. G. Moliere, Z. Naturforsch. A 2, 133 (1947); 3, 78 (1948).
21. K. Murata, T. Matsukawa, and R. Shimizu, Jpn. J. Appl. Phys. 10, 678
22. B. P. Nigam M. K. Sundaresan, and Ta-Wu, Phys. Rev. 115, 491 (1959).
23. L. Reimer and K. H. Sommer, Z. Naturforsch. 239, 1569 (1963).
24. R. E. Burge and G. H. Smith, Proc. Phys. Soc. London 79, 672 (1962).
25. J. Wall, M. Isaacson, and J. P. Langmore, Optik (Stuttgart) 39, 359 (1974).
26. T. E. Everhart, J. Appl. Phys. 31, 1483 (1960).
27. P. D. Miller, J. M. Gibson, A. J. Bleeker, and J. A. Liddle, J. Vac. Sci. Technol. B 11, 2352 (1994).