Metalorganic chemical vapor deposition Pb(Zr,Ti)O3 and selected lower electrode structures as a pathway to integrated piezoelectric microelectromechanical systems

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 5, 2001, Pages 1833-1840

  Chen, Ing Shin ^a   Roeder, Jeffrey F ^a   Kim, Dong Joo ^b   Maria, Jon Paul ^b   Kingon, Angus I ^b  

^a ENTEGRIS INC   (United States)

^b North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIELECTRIC LOSSES; ELECTROSTATIC ACTUATORS; INTERFEROMETRY; MAGNETIC HYSTERESIS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; SILICON WAFERS; X RAY DIFFRACTION ANALYSIS;

DUAL-BEAM INTERFEROMETRY;

THIN FILMS;

EID: 0035441543     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1401747     Document Type: Article

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