Optimal shape design of a rotary microactuator

Journal of Microelectromechanical Systems

Volumn 10, Issue 3, 2001, Pages 460-468

  Jung, Sunghwan ^a   Jeon, Jong Up ^b  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b University of Ulsan   (South Korea)

Author keywords

Electrode; Electrostatic; Microactuator; Optimal shape; Rotary

Indexed keywords

ELECTRODES; ELECTROSTATICS; OPTIMIZATION; SERVOMECHANISMS;

OPTIMAL SHAPE DESIGN; ROTARY MICROACTUATOR;

MICROACTUATORS;

EID: 0035441335     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.946807     Document Type: Article

References (5)

1. Microfabricated electrostatic actuators for hard disk drive
2. Enhanced electrostatic force generation capability of angled comb finger design used in electrostatic comb-drive actuators
3. Stabilization of electrostatically actuated mechanical devices
4. Design and fabrication of an angular microactuator for magnetic disk drives