Ohmic contacts on p-GaN (Part II): Impact of semiconductor fabrication and surface treatment

Materials Science in Semiconductor Processing

Volumn 4, Issue 4, 2001, Pages 367-371

  Wenzel, Roland ^a   Fischer, Gerhard G ^a   Schmid Fetzer, Rainer ^a  

^a CLAUSTHAL UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC CONDUCTIVITY OF SOLIDS; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SURFACE TREATMENT;

CONTACT RESISTIVITY; GALLIUM NITRIDE;

OHMIC CONTACTS;

EID: 0035427690     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(00)00178-5     Document Type: Article

References (6)

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