Theoretical study of the surface reaction mechanism of GaN with HCl

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 35, Issue 12 B, 1996, Pages

  Okamoto, Yasuharu ^a   Takada, Toshikazu ^a   Mochizuki, Yuji ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; CALCULATIONS; CHEMICAL BONDS; CHEMICAL REACTIONS; ETCHING; HYDROCHLORIC ACID; MATHEMATICAL MODELS; SURFACE PHENOMENA;

EXOTHERMIC REACTIONS; MOLECULAR ORBITAL THEORY; REACTION ENERGIES;

NITRIDES;

EID: 0030396357     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.l1641     Document Type: Article

References (8)