Cleaning of GaN surfaces

Journal of Electronic Materials

Volumn 25, Issue 5, 1996, Pages 805-810

  Smith, L L ^a   King, S W ^a   Nemanich, R J ^a   Davis, R F ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

Auger electron spectroscopy (AES); Gallium nitride; Metallization; Ohmic contacts; Surface analysis; Surface cleaning; Thermal desorption

Indexed keywords

EID: 5244219952     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02666640     Document Type: Article

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