Focused ion beam system for automated MEMS prototyping and processing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3223, Issue , 1997, Pages 198-207

  Athas, Gregory J ^a   Noll, Kathryn E ^a   Mello, Russell ^a   Hill, Raymond ^a   Yansen, Don ^a   Wenners, Frank F ^a   Nadeau, James P ^a   Ngo, Tuan ^a   Siebers, Michael ^a  

^a Micrion Corp   (United States)

Author keywords

Focused ion beam; MEMS; Pattern recognition; Thin film heads

Indexed keywords

BEAM CONTROLS; BEAM CURRENTS; DESIGN TOOLS; DIMENSIONAL CHANGES; DIMENSIONAL CONTROLS; FIB SYSTEMS; HARD DISK DRIVES; INSPECTION SOFTWARES; LIQUID GALLIUMS; MAGNETORESISTIVE; MEMS PROCESSING; MEMS PROTOTYPING; MILLING RATES; NEW DESIGNS; PRODUCTION LINE DESIGNS; SPOT SIZES; THIN FILM HEADS; UPSTREAM PROCESSES; VECTOR SCANS;

BEAM PLASMA INTERACTIONS; COMPOSITE MICROMECHANICS; COMPUTER AIDED DESIGN; CONCURRENT ENGINEERING; FOCUSED ION BEAMS; HARD DISK STORAGE; ION BEAMS; ION BOMBARDMENT; ION SOURCES; IONS; JOB ANALYSIS; MACHINING; MEMS; MICROANALYSIS; MICROELECTROMECHANICAL DEVICES; MICROFABRICATION; MICROMACHINING; MILLING (MACHINING); PATTERN RECOGNITION; RAPID PROTOTYPING; THIN FILM DEVICES; THIN FILMS;

PATTERN RECOGNITION SYSTEMS;

EID: 0002604321     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284481     Document Type: Conference Paper

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