|
Volumn 30, Issue 8, 2001, Pages 907-910
|
Wafer bonding of 50-mm-diameter mirror substrates to AlGaInP light-emitting diode wafers
|
Author keywords
AlGaInP; Light emitting diode (LED); Mirror substrates; Wafer bonding
|
Indexed keywords
ALUMINUM ALLOYS;
EFFICIENCY;
GALLIUM ALLOYS;
GOLD ALLOYS;
III-V SEMICONDUCTORS;
INDIUM ALLOYS;
MIRRORS;
SEMICONDUCTOR ALLOYS;
SILICON WAFERS;
SUBSTRATES;
WAFER BONDING;
BONDING;
LIGHT EMITTING DIODES;
LIGHT REFLECTION;
STRESSES;
THIN FILMS;
FORWARD VOLTAGE;
HIGH REFLECTIVITY;
LIGHT-EMITTING DIODE;
LIGHTEMITTING DIODE;
LUMINOUS INTENSITY;
METALLIC MIRRORS;
MIRROR SUBSTRATE;
OPERATING VOLTAGE;
TEST DATA;
WATER BONDING;
LIGHT EMITTING DIODES;
SEMICONDUCTING SILICON;
WAFER BONDING;
|
EID: 0035415827
PISSN: 03615235
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (14)
|
References (11)
|