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Volumn 30, Issue 8, 2001, Pages 907-910

Wafer bonding of 50-mm-diameter mirror substrates to AlGaInP light-emitting diode wafers

Author keywords

AlGaInP; Light emitting diode (LED); Mirror substrates; Wafer bonding

Indexed keywords

ALUMINUM ALLOYS; EFFICIENCY; GALLIUM ALLOYS; GOLD ALLOYS; III-V SEMICONDUCTORS; INDIUM ALLOYS; MIRRORS; SEMICONDUCTOR ALLOYS; SILICON WAFERS; SUBSTRATES; WAFER BONDING; BONDING; LIGHT EMITTING DIODES; LIGHT REFLECTION; STRESSES; THIN FILMS;

EID: 0035415827     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (14)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.