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Volumn 16, Issue 7, 2001, Pages 1998-2006
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Growth behavior and defects in conductive SrRuO3 thin films grown on a Si(100) substrate by sputtering
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL DEFECTS;
CRYSTAL GROWTH;
MICROSTRUCTURE;
OXYGEN;
SILICON;
SPUTTERING;
STRONTIUM COMPOUNDS;
THERMODYNAMIC STABILITY;
THERMODYNAMICS;
TRANSMISSION ELECTRON MICROSCOPY;
TWINNING;
ION-BEAM SPUTTERING;
THIN FILMS;
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EID: 0035410847
PISSN: 08842914
EISSN: None
Source Type: Journal
DOI: 10.1557/JMR.2001.0274 Document Type: Article |
Times cited : (11)
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References (26)
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