Reactively sputtered Ru-Si-O films

Journal of Applied Physics

Volumn 86, Issue 4, 1999, Pages 1974-1981

  Gasser, S M ^a   Kolawa, E ^a   Nicolet, M A ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000869871     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.370996     Document Type: Article

References (49)

1. Jason S. Reid, Ph.D. thesis, California Institute of Technology, 1995.
2. M.-A. Nicolet, Appl. Surf. Sci. 91, 269 (1995).
3. M.-A. Nicolet, Defect Diffus. Forum 143, 1271 (1997).
4. W. J. Dauksher, D. J. Resnick, K. D. Cummings, J. Baker, R. B. Gregory, N. D. Theodore, J. A. Chan, W. A. Johnson, C. J. Mogab, M.-A. Nicolet, and J. S. Reid, J. Vac. Sci. Technol. B 13, 3103 (1995).
5. J. S. Reid, E. Kolawa, C. M. Garland, M.-A. Nicolet, F. Cardone, D. Gupta, and R. P. Ruiz, J. Appl. Phys. 79, 1109 (1996).
6. Xin Sun, Ph.D. thesis, California Institute of Technology, 1997.
7. X. Sun, J. S. Reid, E. Kolawa, and M.-A. Nicolet, J. Appl. Phys. 81, 664 (1997).
8. S. Veprek, S. Reiprich, and S. H. Li, Appl. Phys. Lett. 66, 2640 (1995).
9. S. Veprek and S. Reiprich, Thin Solid Films 268, 64 (1995).
10. S. Veprek, M. Haussmann, and S. Reiprich, J. Vac. Sci. Technol. A 14, 46 (1996).
11. S. Veprek, M. Haussmann, S. Reiprich, L. Shizhi, and J. Dian, Surf. Coat. Technol. 87, 394 (1996).
12. C. Linder, A. Dommann, G. Staufert, and M.-A. Nicolet, Sens. Actuators A 61, 387 (1997).
13. B. D. Cullity, Elements of X-Ray Diffraction (Addison-Wesley, Reading, MA, 1978), Chap. 9.
14. T. B. Massalski, Binary Alloy Phase Diagrams, 2nd ed. (American Society for Metals, Metals Park, OH, 1990).
15. F. Weitzer, P. Rogl, and J. C. Schuster, Z. Metallkd. 79, 154 (1988).
16. R. Pretorius, J. M. Harris, and M.-A. Nicolet, Solid-State Electron. 21, 667 (1978).
17. X. Sun, J. S. Reid, E. Kolawa, and M.-A. Nicolet, J. Appl. Phys. 81, 656 (1997).
18. S. M. Gasser, R. Ruiz, E. Kolawa, and M.-A. Nicolet, J. Electrochem. Soc. 146, 1546 (1999).
19. W. Pan and S. B. Desu, Phys. Status Solidi A 161, 201 (1997).
20. B. Buschinger, C. Geibel, J. Diehl, M. Weiden, W. Guth, A. Wildbrett, S. Horn, and F. Steglich, J. Alloys Compd. 256, 57 (1997).
21. L. N. Finnie, J. Less-Common Met. 4, 24 (1962).
22. I. Engström and T. Johnsson, Ark. Kemi 30, 141 (1968).
23. T. Nakano, K. Suzuki, and T. Yamaguchi, J. Adhes. 46, 131 (1994).
24. JCPDS-International Center for Diffraction data, PCPDFWIN Version 1.10 (1995).
25. CRC Handbook of Chemistry and Physics (CRC, Cleveland, OH, 1994/1995).
26. CRC Handbook of Tables for Applied Engineering Science, edited by R. E. Bolz and G. L. Tuve (CRC, Cleveland, OH, 1970).
27. F. R. de Boer, R. Boom, W. C. M. Mattens, A. R. Miedema, and A. K. Niessen, in Cohesion and Structure Vol. 1, edited by F. R. de Boer and D. G. Pettifor (North-Holland, Amsterdam, 1988).
28. W. D. Ryden and A. W. Lawson, Phys. Rev. B 1, 1494 (1970).
29. J. S. Reid, R. Y. Liu, P. M. Smith, R. P. Ruiz, and M.-A. Nicolet, Thin Solid Films 262, 218 (1995).
30. M. Diserens, J. Patscheider, and F. Lévy, Surf. Coat. Technol. 109, 241 (1998).
31. J. W. Buchler, C. Dreher, and F. M. Kunzel, Struct. Bonding (Berlin) 84, 1 (1995).
32. Comprehensive Coordination Chemistry, edited by Sir G. Wilkinson, R. D. Gillard, and J. A. McCleverty (Pergamon, New York, 1987), Vol. 4, p. 277.
33. B. R. James, Catal. Today 37, 209 (1997).
34. M. Murakami and Y. Ito, J. Syn. Org. Chem. Jpn. 55, 444 (1997).
35. N. V. Sidgwick, The Chemical Elements and Their Compounds (Clarendon, Oxford, 1950).
36. A. B. Nikol'skii and A. N. Ryabov, Russ. J. Inorg. Chem. 9, 3 (1964).
37. Y. Koda, J. Chem. Soc. Chem. Commun. 171, 1347 (1986).
38. T. S. Kalkur and Y. C. Lu, Thin Solid Films 205, 266 (1991).
39. M. L. Green, M. E. Gross, L. E. Papa, K. J. Schnoes, and D. Brasen, J. Electrochem. Soc. 132, 2677 (1985).
40. Z. Yuan, R. J. Puddenphatt, and M. Sayer, Chem. Mater. 5, 908 (1993).
41. V. K. Tagirov, D. M. Chizhikov, E. K. Kazenas, and L. K. Shubochkin, Russ. J. Inorg. Chem. 20, 1133 (1975).
42. E. M. Levin, C. R. Robbins, and H. F. McMurdie, Phase Diagrams for Ceramists (The American Ceramic Society, Columbus, OH, 1964).
43. H. Liehr, J. E. Lewis, and G. W. Rubloff, J. Vac. Sci. Technol. A 5, 1559 (1987).
44. G. W. Rubloff, J. Vac. Sci. Technol. A 8, 1857 (1990).
45. T. Engel, Surf. Sci. Rep. 18, 91 (1993).
46. U. Johansson, H. Zhang, and R. Nyholm, J. Electron Spectrosc. Relat. Phenom. 84, 45 (1997).
47. Q. X. Jia, K. L. Jiao, W. A. Anderson, and F. M. Collins, Mater. Sci. Eng. B 18, 220 (1993).
48. K. M. Yi, K. W. Lee, K. W. Chung, W. S. Um, H. S. Lee, J. K. Song, and I. S. Lee, J. Mater. Sci.: Mater. Electron. 8, 247 (1997).
49. G. V. Planer and L. S. A. Phillips, Thick Film Circuits (Butterworths, London, 1972), p. 48.