Defects in 30 keV Er+-implanted SiO2/Si studied by positron annihilation and cathodoluminescence

Journal of Applied Physics

Volumn 90, Issue 1, 2001, Pages 237-242

  Hirata, K ^a   Arai, H ^b,d   Kawasuso, A ^b   Sekiguchi, T ^c,e   Kobayashi, Y ^a   Okada, S ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b JAPAN ATOMIC ENERGY AGENCY   (Japan)

^c TOHOKU UNIVERSITY   (Japan)

^d IHI CORPORATION   (Japan)

^e NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035395286     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1371948     Document Type: Article

References (32)

1. P. J. Mears, L. Reekie, I. M. Jauncey, and D. N. Payne, Electron. Lett. 23, 1026 (1987).
2. H. Ennen, J. Schneider, G. Pomrenke, and A. Axmann, Appl. Phys. Lett. 43, 943 (1983).
3. H. Ennen, G. Pomrenke, A. Axmann, K. Eisele, W. Haydl, and J. Schneider, Appl. Phys. Lett. 46, 381 (1983).
4. S. Wang, A. Eckau, E. Neufeld, R. Carius, and Ch. Buchal, Appl. Phys. Lett. 71, 2824 (1997).
5. A. Polman, D. C. Jacobson, D. J. Eaglesham, R. C. Kistler, and J. M. Poate, J. Appl. Phys. 70, 3778 (1991).
6. A. Polman and J. M. Poate, J. Appl. Phys. 73, 1669 (1993).
7. A. Polmam, J. Appl. Phys. 82, 1 (1997).
8. Positron in Solids, edited by P. Hautojarvi (Springer, Berlin, 1979).
9. Positron Solid-State Physics, edited by W. Brandt and A. Dupasquier (North-Holland, Amsterdam, 1983).
10. M. J. Puska and R. M. Nieminen, Rev. Mod. Phys. 66, 841 (1994).
11. Positron Spectroscopy of Solids, edited by A. Dupasquier and A. P. Mills, Jr. (IOS, Amsterdam, 1995).
12. P. J. Schultz and K. G. Lynn, Rev. Mod. Phys. 60, 701 (1988).
13. P. Asoka-Kumar, K. G. Lynn, and D. O. Welch, J. Appl. Phys. 76, 4935 (1994).
14. Y. Saitoh, S. Tajima, I. Takada, K. Mizuhashi, S. Uno, K. Ohkoshi, Y. Ishii, T. Kamiya, K. Yotumoto, R. Tanaka, and E. Iwamoto, Nucl. Instrum. Methods Phys. Res. B 89, 23 (1994).
15. J. P. Biersack and L. G. Haggmark, Nucl. Instrum. Methods 174, 257 (1980).
16. Y. Kobayashi, I. Kojima, S. Hishita, T. Suzuki, E. Asari, and M. Kitajima, Phys. Rev. B 52, 823 (1995).
17. T. Sekiguchi and K. Sumino, Rev. Sci. Instrum. 66, 4277 (1995).
18. A. Uedono, L. Wei, S. Tanigawa, R. Suzuki, H. Ohgaki, T. Mikado, T. Kawano, and Y. Ohji, J. Appl. Phys. 75, 3822 (1994).
19. Positron and Positronium Chemistry, edited by D. M. Schrader and Y. C. Jean (Elsevier, Amsterdam, 1988).
20. R. Suzuki, Y. Kobayashi, K. Awazu, T. Mikado, M. Chiwaki, H. Ohgaki, and T. Yamazaki, Nucl. Instrum. Methods Phys. Res. B 91, 410 (1994).
21. O. E. Mogensen, J. Chem. Phys. 60, 998 (1974).
22. M. Hasegawa, M. Tabata, M. Fujinami, Y. Ito, H. Sunaga, S. Okada, and S. Yamaguchi, Nucl. Instrum. Methods Phys. Res. B 116, 347 (1996).
23. E. P. EerNisse and C. B. Norris, J. Appl. Phys. 45, 5196 (1974).
24. J. Ch. Abbe, G. Duplatre, A. G. Maddock, J. Talamoni, and A. Haessler, J. Inorg. Nucl. Chem. 43, 2603 (1981).
25. A. G. Maddock, J. Ch. Abbe, G. Duplatre, and A. Haessler, Chem. Phys. 26, 163 (1977).
26. K. Hirata, Y. Kobayashi, S. Hishita, and Y. Saitoh, Nucl. Instrum. Methods Phys. Res. B 164-165, 471 (2000).
27. J. Lindhard, V. Nielsen, and M. Scharff, K. Dan, Vidensk. Selsk. Mat. Fys. Medd. 36, 10 (1968).
28. M. Fujinami, Phys. Rev. B 53, 13047 (1996).
29. U. Myler, R. D. Goldberg, A. P. Knights, D. W. Lawther, and P. J. Simpson, Appl. Phys. Lett. 69, 3333 (1996).
30. A. Kawasuso, H. Arai, K. Hirata, T. Sekiguchi, Y. Kobayashi, and S. Okada, Radiat. Phys. Chem. 58, 615 (2000).
31. M. A. Marcus and A. Polman, J. Non-Cryst. Solids 136, 260 (1991).
32. E. Snoeks, T. Weber, A. Cacciato, and A. Polman, J. Appl. Phys. 78, 4723 (1995).