Uniaxial, tensile-strained Si devices

Journal of Electronic Materials

Volumn 30, Issue 7, 2001, Pages 807-811

  Belford, Rona E ^a,b  

^a Belford Research Inc   (United States)

^b UNIVERSITY OF EDINBURGH   (United Kingdom)

Author keywords

Devices; Si; Strain; Tensile; Uniaxial

Indexed keywords

BONDING; CARRIER MOBILITY; MOSFET DEVICES; RESISTORS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; STRAIN; SUBSTRATES; TENSILE PROPERTIES;

DIFFUSED RESISTORS; MOBILITY CONDUCTIVITY; SILICON PROCESSING TECHNOLOGY; TENSILE STRAINED SILICON DEVICES;

SEMICONDUCTOR DEVICES;

EID: 0035391325     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-001-0061-8     Document Type: Article

References (14)