Design of an optical probe for surface profile measurement

Optical Engineering

Volumn 38, Issue 7, 1999, Pages 1223-1228

  Huang, Peisen S ^a   Xu, Xiaorong R ^b  

^a STONY BROOK UNIVERSITY   (United States)

^b Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE MEASUREMENT; INTEGRATION; INTERFEROMETERS; LASER BEAMS; LIGHT REFLECTION; MIRRORS; SCANNING;

ANGLE MEASUREMENT BASED ON THE INTERNAL-REFLECTION EFFECTS (AMIRE); COORDINATE MEASURING MACHINES (CMM);

PROBES;

EID: 0032680247     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.602279     Document Type: Article

References (14)

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