SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 3, 2001, Pages 893-898

Low energy O2+ and N2+ beam-induced profile broadening effects in Si

(2) Deenapanray, P N K a Petravic, M a

a AUSTRALIAN NATIONAL UNIVERSITY (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELD EFFECTS; ION BOMBARDMENT; ION IMPLANTATION; PROFILOMETRY; SECONDARY ION MASS SPECTROMETRY; SURFACE ROUGHNESS;

FIELD-INDUCED SEGREGATION; PROFILE BROADENING;

SILICON WAFERS;

EID: 0035334445 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1354602 Document Type: Article

Times cited : (3)

References (27)

1
- 0020495413
- (1984) Vacuum , vol.34 , pp. 119
- Wittmaack, K.¹

2
- 0025416857
- (1990) Appl. Phys. A: Solids Surf. , vol.50 , pp. 417
- Homma, Y.¹ Wittmaack, K.²

3
- 84912907721
- (1991) J. Vac. Sci. Technol. A , vol.9 , pp. 1482
- Meunis, M.¹ Vandervorst, W.² Jackman, J.³

4
- 0004907214
- (1993) Fresenius J. Anal. Chem. , vol.346 , pp. 92
- Zastrow, U.¹ Beyer, W.² Herion, J.³

5
- 3643090763
- (1969) Phys. Rev. , vol.184 , pp. 383
- Sigmund, P.¹

6
- 0004867130
- (1992) Nucl. Instrum. Methods Phys. Res. B , vol.67 , pp. 495
- Zalm, P.C.¹ Vriezema, C.J.²

7
- 0002689568
- edited by J. W. Rabalais (Wiley, Chichester)
- (1994) Low Energy Ion-Surface Interactions , pp. 389
- Herbots, N.¹ Hellman, O.C.² Ye, P.³ Wang, X.⁴ Vancauwenberghe, O.⁵

8
- 0000942809
- (1998) Appl. Phys. Lett. , vol.73 , pp. 1287
- Petravic, M.¹ Williams, J.S.² Conway, M.³ Deenapanray, P.N.K.⁴

9
- 0033076211
- (1999) Surf. Interface Anal. , vol.27 , pp. 92
- Deenapanray, P.N.K.¹ Petravic, M.²

10
- 0003698310
- (Wiley, New York), Sec. 2.2.
- (1989) Secondary Ion Mass Spectrometry
- Wilson, R.G.¹ Stevie, F.A.² Magee, C.W.³

11
- 0032475346
- (1998) Appl. Surf. Sci. , vol.135 , pp. 200
- Petravic, M.¹

12
- 0026260838
- (1991) Surf. Interface Anal. , vol.17 , pp. 875
- Vriezema, C.J.¹ Zalm, P.C.²

13
- 0004856153
- (1991) Appl. Phys. Lett. , vol.58 , pp. 2138
- Wittmaack, K.¹ Homma, Y.²

14
- 0030565121
- (1996) Nucl. Instrum. Methods Phys. Res. B , vol.118 , pp. 151
- Petravic, M.¹ Svensson, B.G.² Williams, J.S.³ Glasko, J.M.⁴

15
- 0001765001
- (1999) J. Appl. Phys. , vol.85 , pp. 3993
- Deenapanray, P.N.K.¹ Petravic, M.²

16
- 0033908584
- (2000) Surf. Interface Anal. , vol.29 , pp. 160
- Deenapanray, P.N.K.¹ Petravic, M.²

17
- 0000450366
- (2000) J. Appl. Phys. , vol.87 , pp. 2178
- Deenapanray, P.N.K.¹ Petravic, M.²

18
- 0025236039
- (1990) Nucl. Instrum. Methods Phys. Res. B , vol.45 , pp. 219
- Menzel, N.¹ Wittmaack, K.²

19
- 0002685842
- edited by A. Benninghoven, P. Bertrand, and H. W. Werner (Elsevier, Amsterdam)
- (2000) Secondary Ion Mass Spectrometry XII , pp. 545
- Petravic, M.¹ Deenapanray, P.N.K.² Demanet, C.M.³ Moon, D.W.⁴

20
- 0004865003
- unpublished
- Deenapanray, P.N.K.¹ Petravic, M.²

21
- 0024769806
- (1989) Surf. Interface Anal. , vol.14 , pp. 725
- Homma, Y.¹ Maruo, T.²

22
- 0028442666
- (1994) Surf. Interface Anal. , vol.21 , pp. 323
- Wittmaack, K.¹

23
- 0033706530
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 273
- McKinley, J.M.¹ Stevie, F.A.² Granger, C.N.³ Renard, D.⁴

24
- 0016939795
- (1976) J. Appl. Phys. , vol.47 , pp. 1232
- Werner, H.W.¹ Morgan, A.E.²

25
- 0032633837
- (1999) Surf. Sci. , vol.424 , pp. 299
- Kataoka, Y.¹ Wittmaack, K.²

26
- 0018434232
- (1979) Appl. Phys. , vol.18 , pp. 131
- Andersen, H.H.¹

27
- 0003412161
- Pergamon, New York
- (1986) The Stopping and Range of Ions in Solids , vol.1
- Ziegler, J.F.¹ Biersack, J.P.² Littmark, U.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.