On the nitridation of silicon by low energy nitrogen bombardment

Applied Physics Letters

Volumn 73, Issue 9, 1998, Pages 1287-1289

  Petravic M ^a   Williams, J S ^a   Conway, M ^a   Deenapanray, P N K ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000942809     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.122151     Document Type: Article

References (16)

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