The behaviour of deuterium incorporated into the buried oxide of SIMOX

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 178, Issue 1-4, 2001, Pages 287-290

  Rivera, A ^a,b   Van Veen, A ^a   Schut, H ^a   De Nijs, J M M ^b   Balk, P ^b   Alkemade, P F A ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Deuterium; Hydrogen; Positron; SIMOX; SOI; TDS

Indexed keywords

ACTIVATION ENERGY; ANNEALING; DEUTERIUM; DISSOCIATION; HYDROGEN; POSITRONS; SECONDARY ION MASS SPECTROMETRY;

BURIED OXIDE LAYERS; POSITRON BEAM ANALYSIS; THERMAL DESORPTION SPECTROMETRY;

ION IMPLANTATION;

EID: 0035333979     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(00)00484-5     Document Type: Conference Paper

References (11)