Interaction of deuterium with the SIMOX oxide

Materials Research Society Symposium - Proceedings

Volumn 513, Issue , 1998, Pages 331-335

  Zimmerman, L ^a   Rivera, A ^a   De Nijs, J M M ^a   Van Veen, A ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; DESORPTION; DEUTERIUM; OXIDES; SEMICONDUCTING SILICON;

SEPARATION BY IMPLANTATION OF OXYGEN (SIMOX);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031622434     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-513-331     Document Type: Conference Paper

References (8)