SCOPUS 정보 검색 플랫폼

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 178, Issue 1-4, 2001, Pages 148-153

Influence of ion energy on titanium oxide formation by vacuum arc deposition and implantation

(4) Mandl S a,b Thorwarth, G a Manova, D a Rauschenbach, B a,b

a UNIVERSITY OF AUGSBURG (Germany)

b LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM (Germany)

Author keywords

Arc evaporation; PIII; RBS; Titanium oxide; XRD

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARRIER MOBILITY; ETCHING; EVAPORATION; GRAIN BOUNDARIES; ION IMPLANTATION; STOICHIOMETRY; SUBSTRATES; SURFACE ROUGHNESS; TITANIUM OXIDES; VACUUM APPLICATIONS; X RAY DIFFRACTION ANALYSIS;

HYPERTHERMAL ENERGY; VACUUM ARC DEPOSITION;

SEMICONDUCTING FILMS;

EID: 0035333933 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(01)00513-4 Document Type: Conference Paper

Times cited : (12)

References (19)

1
- 0032762002
- (1999) Appl. Surf. Sci. , vol.137 , pp. 38
- Escobar-Alarcón, L.¹ Haro-Poniatowski, E.² Camacho-López, M.A.³ Fernández-Guasti, M.⁴ Jímenez-Jarquín, J.⁵ Sánchez-Pineda, A.⁶

2
- 0032614865
- (1999) Appl. Phys. Lett. , vol.74 , pp. 3143
- Lee, B.H.¹ Jeon, Y.² Zawadzki, K.³ Qi, W.-J.⁴ Lee, J.⁵

3
- 0028418722
- (1994) J. Biomater. Appl. , vol.8 , pp. 404
- Huang, N.¹ Chen, Y.² Luo, J.³ Yi, J.⁴ Lu, R.⁵ Xiao, J.⁶ Xue, Z.⁷ Liu, X.⁸

4
- 0028518655
- (1994) Biomaterials , vol.15 , pp. 1062
- Larsson, C.¹ Thomsen, P.² Lausmaa, J.³ Rodahl, M.⁴ Kasemo, B.⁵ Ericson, L.E.⁶

5
- 0028517528
- (1994) Solid State Commun. , vol.92 , pp. 267
- Tang, H.¹ Berger, H.² Schmid, P.R.³ Lévy, F.⁴

6
- 0029308018
- (1995) Sens. Actuators B , vol.26-27 , pp. 71
- Tang, H.¹ Prasad, K.² Sanjines, R.³ Lévy, F.⁴

7
- 0343962670
- (2000) Surf. Sci. Lett. , vol.446
- Nörenberg, H.¹ Dinelli, F.² Briggs, G.A.D.³

8
- 0028400662
- (1994) Thin Solid Films , vol.239 , pp. 186
- Battiston, G.A.¹ Gerbasi, R.² Porchia, M.³

9
- 0031143137
- (1997) Thin Solid Films , vol.300 , pp. 113
- Martin, N.¹ Rousselot, C.² Rondot, D.³ Palmino, F.⁴ Mercier, R.⁵

10
- 0028516346
- (1994) Thin Solid Films , vol.251 , pp. 72
- Löbl, P.¹ Huppertz, M.² Mergel, D.³

11
- 0000290258
- (1994) Rev. Sci. Instrum. , vol.65 , pp. 1253
- Anders, S.¹ Anders, A.² Brown, I.G.³

12
- 0033707302
- (2000) Surf. Coat. Technol. , vol.128-129 , pp. 116
- Thorwarth, G.¹ Mändl, S.² Rauschenbach, B.³

13
- 0034310621
- (2000) Surf. Coat. Technol. , vol.133-134 , pp. 283
- Mändl, S.¹ Thorwarth, G.² Rauschenbach, B.³

14
- 0001483582
- (1959) Acta. Chem. Scand. , vol.13 , pp. 989
- Andersson, S.¹ Sundholm, A.² Magnéli, A.³

15
- 0004029498
- Noyes Publications, Park Ridge, NJ
- (1995) Handbook of Vacuum Arc Science and Technology , pp. 73
- Boxman, R.L.¹ Sanders, D.M.² Martin, P.J.³

16
- 0004825666
- Joint Committee for Powder Diffraction Standards, Powder Diffraction File, International Center for Diffraction Data, Park Lane
- (1989)

17
- 33845646725
- (1967) J. Phys. Chem. Solids , vol.28 , pp. 1393
- Anderson, J.S.¹ Hyde, B.G.²

18
- 0003644435
- R.F. Bunshah (Eds.), Noyes Publications, Park Ridge, New Jersey
- Deposition Technologies for Films and Coatings
- Thornton, J.A.¹

19
- 0019607301
- (1982) Radiat. Effect. , vol.64 , pp. 71
- Pells, G.P.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.