Hydrogen effects on the post-production modification of diamond-like carbon produced by pulsed laser deposition

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 970-975

  Cheng, C L ^a   Chia, C T ^b   Chiu, C C ^a   Wu, C C ^a   Lin, I N ^c  

^a NATIONAL DONG HWA UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN NORMAL UNIVERSITY   (Taiwan)

^c NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Diamond like carbon; Etching; Raman spectroscopy; Thermal annealing

Indexed keywords

ATOMIC HYDROGEN ETCHING;

ANNEALING; ETCHING; GRAPHITE; HYDROGEN; PULSED LASER DEPOSITION; RAMAN SCATTERING; RAMAN SPECTROSCOPY;

DIAMOND LIKE CARBON FILMS;

DIAMOND-LIKE CARBON;

EID: 0035270408     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00508-2     Document Type: Article

References (17)

1. McKenzie D.R. Rep. Prog. Phys. 59:1996;1611.
2. Silva R., Amaratunga G.A.J., Robertson J., Milne W.I. Amorphous Carbon - State of the Art. 1998;World Scientific, Singapore.
3. Yoshitake T., Aoki H., Suizu K., Takahashi K., Nagayama K. Appl. Surf. Sci. 141:1999;129.
4. Chrisey D.B., Hubler G.K. Pulsed Laser Deposition of Thin Films. 1994;Wiley, New York.
5. Yoshitake T., Nishiyama T., Nagayama K. Diamond Relat. Mater. 9:2000;689.
6. Friedmann T.A., McCarty K.F., Barbour J.C., Siegal M.P., Dibble D.C. Appl. Phys. Lett. 68:(12):1996;1643.
7. Bowden M., Gardiner D.J., Southall J.M. J. Appl. Phys. 71:(1):1992;521.
8. Lamberton R.W., Morley S.M., Maguire P.D., McLaughlin J.A. Thin Solid Films. 333:1998;114.
9. Jacobsohn L.G., Prioli R., Freire F.L. Jr., Mariotto G., Lacerda M.M., Chung Y.W. Diamond Relat. Mater. 9:2000;680.
10. Kumar A., Ekanayaka U., Kapat J.S. Surf. Coat. Technol. 102:1998;113.
11. Tuinstra F., Koening J.L. J. Chem. Phys. 53:1970;1126.
12. Conway N.M.J., Feerrari A.C., Flewitt A.J., Robertson J., Milne W.I., Tagliaferro A., Beyer W. Diamond Relat. Mater. 9:2000;765.
13. Ogwu A.A., Lamberton R.W., Morley S., Maguire P., McLaughlin J.M. Physica B. 269:1999;335.
14. Kalish R., Lifshitz Y., Nugent K., Prawer S. Appl. Phys. Lett. 74:1999;2936.
15. Tang X.-M., Weber J., Mikhailov S.N., Müller C., Hänni W., HinterMann H.E. J. Non-Cryst. Solids. 185:1995;145.
16. Tang X.-M., Weber J., Bear Y., Müller C., Hänni W., HinterMann H.E. J. Phys. Rev. B. 48:1993;10124.
17. Wild C., Koidl P. Appl. Phys. Lett. 51:1987;1506.