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Volumn 102, Issue 1-2, 1998, Pages 113-118
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Characterization of pulsed laser-deposited diamond-like carbon films
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Author keywords
Diamond like carbon films; Hardness; Micro raman spectra; Pulsed laser deposition; Young's modulus
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CRYSTAL MICROSTRUCTURE;
DEPOSITION;
ELASTIC MODULI;
GLASS;
HARDNESS;
PULSED LASER APPLICATIONS;
RAMAN SPECTROSCOPY;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING SILICON;
THERMAL EFFECTS;
X RAY CRYSTALLOGRAPHY;
PULSED LASER DEPOSITION;
DIAMOND FILMS;
CARBON;
CORROSION INHIBITING COATING;
FILM;
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EID: 0032053001
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(97)00686-5 Document Type: Article |
Times cited : (14)
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References (13)
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