Spectro-ehipsometry investigation of cascaded crystallization behavior of phase-change Ge-Sb-Te alloy

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 40, Issue 3 B, 2001, Pages 1575-1577

  Kim, Sang Youl ^a   Kim, Sang Jun ^a   Lim, Hanjo ^a   Lah, Sang Moo ^a   Park, Young Dong ^b   Jeong, Tae Hee ^b   Seo, Hun ^b  

^a Ajou University   (South Korea)

^b LG Electronics Inc   (South Korea)

Author keywords

Crystallization kinetics; Depolarization; In situ ellipsometry; Phase change Ge Sb Te alloy; Spectroscopic ellipsometry

Indexed keywords

ELLIPSOMETRY; GERMANIUM ALLOYS; METALLIC FILMS; SPECTROSCOPIC ANALYSIS; X RAY DIFFRACTION;

CRYSTALLIZATION KINETICS; DEPOLARIZATION;

CRYSTALLIZATION;

EID: 0035267554     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.1575     Document Type: Article

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