Role of hydrogen in hydrogenated microcrystalline silicon

Solar Energy Materials and Solar Cells

Volumn 66, Issue 1-4, 2001, Pages 239-244

  Itoh, T ^a   Yamamoto, K ^a   Harada, H ^a   Yamana, N ^a   Yoshida, N ^a   Inouchi, H ^a   Nonomura, S ^a   Nitta, S ^a  

^a GIFU UNIVERSITY   (Japan)

Author keywords

(Si H2) n chain structure; Hot wire assisted PECVD; Hydrogen density; Hydrogen radical; c Si:H

Indexed keywords

HYDROGEN; HYDROGENATION; INFRARED RADIATION; LIGHT ABSORPTION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON;

HYDROGENATED MICROCRYSTALLINE SILICON;

CRYSTALLINE MATERIALS;

EID: 0035254038     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(00)00179-3     Document Type: Article

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