Hydrogen dilution effect on the crystallinity of silicon films grow by Hot Wire Cell method

Materials Research Society Symposium - Proceedings

Volumn 557, Issue , 1999, Pages 531-536

  Ichkawa, M ^a   Takeshita, J ^a   Yamada, A ^a   Konagai, M ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CRYSTAL STRUCTURE; DEPOSITION; FILM GROWTH; HYDROGEN; PHOTOVOLTAIC CELLS; POLYCRYSTALLINE MATERIALS; THIN FILMS;

HOT WIRE CELL METHOD; HYDROGEN DILUTION;

SEMICONDUCTING SILICON;

EID: 0033300083     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (3)

1. H. Matsumura, Jpn. J. Appl. Phys. 37, 3175 (1998)
2. M. Ichikawa, J. Takeshita, A. Yamada and M. Konagai, Jpn. J. Appl. Phys. 38, L24 (1999).
3. T. Kaneko, M. Wakagi, K. Onisawa and T. Minemura, Appl. Phys. Lett. 64, 1865 (1994)