Modeling species and energy transport in moderate pressure diamond deposition H2 plasmas

Journal de Physique III

Volumn 6, Issue 9, 1996, Pages 1229-1243

  Hassouni, K ^a   Farhat, S ^a   Scott, C D ^a,b   Gicquel, A ^a  

^a UNIVERSITÉ PARIS 13   (France)

^b NASA JOHNSON SPACE CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; DIAMOND FILMS; DIAMONDS; DISSOCIATION; ELECTRIC DISCHARGES; ELECTRONS; ENERGY TRANSFER; HYDROGEN; MATHEMATICAL MODELS; PLASMA DENSITY; PLASMA DEVICES;

DIAMOND DEPOSITION MICROWAVE PLASMA REACTOR; PLASMA TEMPERATURES;

PLASMAS;

EID: 0030246492     PISSN: 11554320     EISSN: None     Source Type: Journal    
DOI: 10.1051/jp3:1996182     Document Type: Article

References (15)

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