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Volumn 7, Issue 6, 1998, Pages 769-773

The effect of hydrogen evolution on the mechanical properties of hydrogenated amorphous carbon

Author keywords

Amorphous carbon; H bonding configuration; Internal stress

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; DOPING (ADDITIVES); HYDROGEN; HYDROGENATION; MECHANICAL PROPERTIES; STRESSES;

EID: 0032092255     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(97)00300-2     Document Type: Article
Times cited : (14)

References (24)
  • 10
    • 0000293935 scopus 로고
    • G. Hasd and R.E. Thun (Eds), Academic, NY.
    • R.W. Hoffman. in: G. Hasd and R.E. Thun (Eds), Physics of Thin Films, Vol. 3, Academic, NY. 1966. p. 211.
    • (1966) Physics of Thin Films , vol.3 , pp. 211
    • Hoffman, R.W.1
  • 11
    • 0003312415 scopus 로고
    • L.I. Maissel and R. Glang (Eds), McGraw-Hill, NY
    • D.S. Campbell, in: L.I. Maissel and R. Glang (Eds), Handbook of Thin Film Technology, McGraw-Hill, NY. 1970, p. 12.
    • (1970) Handbook of Thin Film Technology , pp. 12
    • Campbell, D.S.1
  • 17
    • 0001620989 scopus 로고
    • Amorphous Hydrogenated Carbon Films
    • P. Oelhafen (Ed.), Les éditions de Physique, Paris
    • P. Koidl, Amorphous Hydrogenated Carbon Films, in: P. Oelhafen (Ed.), Proceedings of the European Material Research Society, Vol. 17, Les éditions de Physique, Paris, 1987.
    • (1987) Proceedings of the European Material Research Society , vol.17
    • Koidl, P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.