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Materials Research Society Symposium - Proceedings

Volumn 647, Issue , 2001, Pages

Optimization of the ion-cut process in Si and SiC

(3) Holland, O W a Thomas, D K a Gregory, R B a

a OAK RIDGE NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; HETEROJUNCTIONS; ION IMPLANTATION; OPTIMIZATION; SILICON CARBIDE; SILICON ON INSULATOR TECHNOLOGY; TEMPERATURE;

EXFOLIATION; HYDROPHILIC WAFER BONDING; ION CUT PROCESS; TEMPERATURE IRRADIATION;

SEMICONDUCTING SILICON;

EID: 0035187519 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (4)

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