Method for achieving constant rotation rates in a microorthogonal linkage system

Journal of Microelectromechanical Systems

Volumn 9, Issue 2, 2000, Pages 236-244

  Romero, L A ^a   Dickey, F M ^a   Holswade, S C ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DAMPING; ENGINES; FEEDBACK; FRICTION; ROTATION; SPRINGS (COMPONENTS);

DRIVE SIGNALS; MICROORTHOGONAL LINKAGE SYSTEM; SILICON MICROMACHINE;

MICROELECTROMECHANICAL DEVICES;

EID: 0033717537     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.846704     Document Type: Article

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