Mass production of quartz high-speed chemical etching applied to AT-cut wafers

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 2001, Pages 368-375

  Watanabe, T ^a  

^a World Technol Instrument Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONTAMINATION; CRYSTAL GROWTH; CRYSTALS; ETCHING; LAPPING; WASHING; WSI CIRCUITS;

QUARTZ CRYSTAL WAFERS;

QUARTZ;

EID: 0035161342     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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