Chemical etching of Y-rotated quartz plates: Experiments and theoretical approach

Sensors and Actuators, A: Physical

Volumn 61, Issue 1-3, 1997, Pages 405-414

  Leblois, T ^a   Tellier, C R ^a   Messaoudi, T ^a  

^a Electron et Piezoelectricite   (France)

Author keywords

Chemical etching; Y rotated quartz plates

Indexed keywords

AMMONIUM COMPOUNDS; ANISOTROPY; ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; DISSOLUTION; ETCHING; MICROMACHINING; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTIES; TEXTURES;

AMMONIUM BIFLUORIDE; Y ROTATED QUARTZ PLATES;

QUARTZ;

EID: 0031165553     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80297-X     Document Type: Article

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