Cut-independent deep structuring of quartz for frequency control applications

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 1996, Pages 615-622

  Thornell, G ^a   Hjort, K ^a   Studer, B ^a   Schweitz, J A ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; ETCHING; ION BOMBARDMENT; MASKS; MICROMACHINING; QUARTZ; QUARTZ APPLICATIONS; SINGLE CRYSTALS;

SHADOW MASKING; TUNING FORKS;

ELECTRIC FREQUENCY CONTROL;

EID: 0030401775     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)