Perpendicular actuation with individually controlled polymer microactuators

Advanced Materials

Volumn 13, Issue 1, 2001, Pages 76-79

  Jager, Edwin W H ^a   Inganäs, Olle ^a   Lundström, Ingemar ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; INJECTION MOLDING; MEDICAL APPLICATIONS; MICROMACHINING; POLYMERS;

POLYMER MICROACTUATORS;

MICROACTUATORS;

EID: 0035135197     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-4095(200101)13:1<76::AID-ADMA76>3.0.CO;2-I     Document Type: Article

References (29)

1. H. Westberg, M. Boman, S. Johansson, J. A. Schweitz, J. Appl. Phys. 1993, 73, 7864.
2. Y. Xia, G. M. Whitesides, Angewandte Chemie Int. Ed. 1998, 37, 550.
3. K. S. J. Pister, M. W. Judy, S. R. Burgett, R. S. Fearing, Sens. Actuators A 1992, 33, 249.
4. R. Yeh, E. J. J. Kruglick, K. S. J. Pister, J. Microelectromechanical Syst. 1996, 5, 10.
5. M.-H. Kiang, O. Solgaard, K. Y. Lau, R. S. Muller, J. Microelectromechanical Syst. 1998, 7, 27.
6. K. Suzuki, I. Shimoyama, H. Miura, J. Microelectromechanical Syst. 1994, 3, 4.
7. T. Ebefors, E. Kälvesten, G. Stemme, in IEEE Int. Workshop on MicroElectroMechanical Sytems (MEMS '98), Heidelberg, Germany 1993, p. 93.
8. P. W. Green, R. R. A. Syms, E. M. Yeatman, J. Microelectromechanical Syst. 1995, 4, 170.
9. R. R. A. Syms, J. Microelectromechanical Syst. 1999, 8, 448.
10. E. Smela, M. Kallenbach, J. Holdenried, J. Microelectromechanical Syst. 1999, 8, 373.
11. E. Smela, Adv. Mater. 1999, 11, 1343.
12. C.-J. Kim, A. P. Pisano, R. S. Muller, J. Microelectromechanical Syst. 1992, 1, 31.
13. J. W. Judy, R. S. Muller, H. H. Zappe, in Solid-State Sensor and Actuator Workshop (Hilton Head '94), Hilton Head Island, SC, USA 1994, p. 43.
14. C. Liu, T. Tsao, Y.-C. Tai, T.-S. Leu, C.-M. Ho, W.-L. Tang, D. Miu, in Proc. IEEE Micro Electro Mechanical Systems 1995, Amsterdam, Netherlands 1995, p. 7 (Cat. No. 95CH35754).
15. M. Elwenspoek, L. Smith, B. Hök, J. Micromech. Microeng. 1992, 2, 221.
16. G. Lin, C.-J. Kim, S. Konishi, H. Fujita, in Transducers '95, Stockholm, Sweden 1995, p. 416.
17. E. Smela, O. Inganäs, I. Lundström, in Transducers '95, Stockholm, Sweden 1995, p. 350.
18. R. H. Baughman, L. W. Shacklette, R. L. Elsenbaumer, E. J. Plichta, C. Becht, in Molecular Electronics (Ed. P. I. Lazarev), Kluwer Academic Publishers, Dordrecht 1991, p. 267.
19. Q. Pei, O. Inganäs, I. Lundström, Smart Mater. Struct. 1993, 2, 1.
20. T. F. Otero, J. M. Sansinena, Proc. SPIE - The International Society for Optical Engineering, 1996, 2779, 365.
21. A. Della Santa, D. De Rossi, A. Mazzoldi, Smart Mater, Struct. 1997, 6, 23.
22. M. R. Gandhi, P. Murray, G. M. Spinks, G. G. Wallace, Synth. Met. 1995, 73, 247.
23. E. Smela, O. Inganäs, I. Lundström, Science 1995, 268, 1735.
24. A. P. Lee, K. C. Hong, J. Trevino, M. A. Northrop, in Dynamic and Systems and Control Session, International Mechanichal Engineering Congress, Chicago, USA 1994, p. 725.
25. E. W. H. Jager, E. Smela, O. Inganäs, I. Lundström, Smart Structures and Materials, EAPAD '99, Newport Beach, CA, USA 1999, p. 377.
26. E. Smela, O. Inganäs, Q. Pei, I. Lundström, Adv. Mater. 1993, 5, 630.
27. E. W. H. Jager, O. Inganäs, I. Lundström, Science 2000, 288, 2335.
28. E. Smela, O. Inganäs, I. Lundström, in Transducers '95, Stockholm, Sweden 1995, p. 218.
29. E. W. H. Jager, E. Smela, O. Inganäs, Sens. Actuators B: Chemical 1999, 56, 73.