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Sensors and Materials

Volumn 12, Issue 3, 2000, Pages 143-162

Fabrication process for high Q polysilicon beam resonators

(2) Yongchul, Ahn a Guckel, Henry a

a University of Wisconsin Madison (United States)

Author keywords

Polysilicon; Resonator; Sensor; Surface micromachining; Vacuum cavity

Indexed keywords

EID: 0034354727 PISSN: 09144935 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (6)

References (15)

1
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- (1992) Sensors and Actuators A , vol.35 , pp. 51
- Zook, J.D.¹ Burns, D.W.² Guckel, H.³ Sniegowski, J.J.⁴ Engelstad, R.L.⁵ Feng, Z.⁶

2
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- H. Guckel: Sensors and Materials, 4(5) (1993) 251.
- (1993) Sensors and Materials , vol.4 , Issue.5 , pp. 251
- Guckel, H.¹

3
- 0001732764
- Yokohama, Japan
- H. Guckel, M. Nesnidal, J. D. Zook and D. W. Burns: Transducers '93, Proc. of 7th Intl. Conf. on Solid-State Sensors and Actuators, Yokohama, Japan, p. 686.
- Transducers '93, Proc. of 7th Intl. Conf. on Solid-state Sensors and Actuators , pp. 686
- Guckel, H.¹ Nesnidal, M.² Zook, J.D.³ Burns, D.W.⁴

4
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- Ph.D. Thesis, University of Wisconsin-Madison, USA, Dec.
- J. J. Sniegowski: Ph.D. Thesis, University of Wisconsin-Madison, USA, Dec., 1991.
- (1991)
- Sniegowski, J.J.¹

5
- 0001732766
- Conf. Miniaturized Systems with Micro-optics and Micromechanics, Photonics 1995, San Jose, CA, USA, February
- J. D. Zook, D. W. Burns, J. N. Schoess and H. Guckel: SPIE Proc. Vol. 2383A, Conf. Miniaturized Systems with Micro-optics and Micromechanics, Photonics 1995, San Jose, CA, USA, February 1995.
- (1995) SPIE Proc. , vol.2383 A
- Zook, J.D.¹ Burns, D.W.² Schoess, J.N.³ Guckel, H.⁴

6
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- J. D. Zook , D. W. Burns, W. R. Herb, H. Guckel, J. W. Kang and Y. Ahn: Sensors and Actuators A 52 (1996) 92.
- (1996) Sensors and Actuators A , vol.52 , pp. 92
- Zook, J.D.¹ Burns, D.W.² Herb, W.R.³ Guckel, H.⁴ Kang, J.W.⁵ Ahn, Y.⁶

7
- 0001809290
- Ph.D. Thesis, University of Wisconsin-Madison, USA, May
- J. W. Kang: Ph.D. Thesis, University of Wisconsin-Madison, USA, May, 1996.
- (1996)
- Kang, J.W.¹

8
- 0021640198
- H. Guckel and D. W. Burns: IEDM Digest, 1984, p. 223.
- (1984) IEDM Digest , pp. 223
- Guckel, H.¹ Burns, D.W.²

9
- 0001970353
- Ph. D. Thesis, Dept. Mat. Sci., UW-Madison, U.S.A.
- D. W. Burns: Ph. D. Thesis, Dept. Mat. Sci., UW-Madison, U.S.A. 1988.
- (1988)
- Burns, D.W.¹

10
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- Jul/Aug
- J. David Zook, William R. Herb, Y. Ahn and Henry Guckel: J. Vac. Sci. & Technol. A 17(4), Jul/Aug (1999) 2286.
- (1999) J. Vac. Sci. & Technol. A , vol.17 , Issue.4 , pp. 2286
- Zook, J.D.¹ Herb, W.R.² Ahn, Y.³ Guckel, H.⁴

11
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- H. Guckel, D. W. Burns, C. C. G. Visser, H. A. C. Tilmans and D. Deroo: IEEE Trans. on Electron Devices, ED-35 (1988) 800.
- (1988) IEEE Trans. on Electron Devices , vol.35 ED , pp. 800
- Guckel, H.¹ Burns, D.W.² Visser, C.C.G.³ Tilmans, H.A.C.⁴ Deroo, D.⁵

12
- 0001915023
- June 25-30
- K. Ikeda, H. Kuwayama, T. Kobayashi, T. Watanabe, T. Nishikawa, T. Yoshida and K. Harada: Proc. of the 5th Intl. Conf. Solid-State Sensors and Actuators and Eurosensors III, Vol. 2, June 25-30, 1989, p. 146.
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13
- 0001768531
- Technical data from Arch Chemicals Corp.
- Defreckling Aluminum Etchant (DAE), Technical data from Arch Chemicals Corp.

14
- 0001768533
- Ph.D. Thesis, University of Wisconsin-Madison, USA
- Y. Ahn: Ph.D. Thesis, University of Wisconsin-Madison, USA, 1999.
- (1999)
- Ahn, Y.¹

15
- 0004098086
- John Wiley & Sons
- L. E. Kinsler, A. R. Ferry, A. B. Coppens and J. V. Sanders: Fundamentals of Acoustics, 3rd Edition, John Wiley & Sons, 1982, p.51.
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- Kinsler, L.E.¹ Ferry, A.R.² Coppens, A.B.³ Sanders, J.V.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.