Evolution of hillocks during silicon etching in TMAH

Journal of Micromechanics and Microengineering

Volumn 11, Issue 1, 2001, Pages 61-69

  Thong, John T L ^a   Luo, P ^a   Choi, W K ^a   Tan, S C ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; DISSOLUTION; EROSION; SCANNING ELECTRON MICROSCOPY; SILICON; SIZE DETERMINATION;

HILLOCKS;

ETCHING;

EID: 0035121107     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/11/1/310     Document Type: Article

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