Design and fabrication of a highly symmetrical capacitive triaxial accelerometer

Journal of Micromechanics and Microengineering

Volumn 11, Issue 1, 2001, Pages 48-54

  Li, Gang ^a   Li, Zhihong ^a   Wang, Congshun ^a   Hao, Yilong ^a   Li, Ting ^a   Zhang, Dacheng ^a   Wu, Guoying ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROMACHINING;

MECHANICAL RESPONSES; TRIAXIAL ACCELEROMETERS; ZERO CROSS-AXIS SENSITIVITIES;

ACCELEROMETERS;

EID: 0035120992     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/11/1/308     Document Type: Article

References (11)

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