Design and processing experiments of a new miniaturized capacitive triaxial accelerometer

Sensors and Actuators, A: Physical

Volumn 68, Issue 1-3, 1998, Pages 324-328

  Puers, Robert ^a   Reyntjens, Steve ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Accelerometers; Anisotropic etch; Corner compensation; Mechanical sensors; Triaxial

Indexed keywords

ACCELERATION; CAPACITANCE; MICROMACHINING; SENSORS;

ANISOTROPIC ETCH; CORNER COMPENSATION; MECHANICAL SENSORS; TRIAXIAL ACCELEROMETER;

ACCELEROMETERS;

EID: 0041636170     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00032-6     Document Type: Article

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