Nanometer-scale voids in PECVD silicon-oxide films probed by variable-energy positron lifetime spectroscopy: A comparison with infrared spectroscopy

Radiation Physics and Chemistry

Volumn 60, Issue 4-5, 2001, Pages 545-549

  Wang, C L ^a,c   Kobayashi, Y ^a,b   Hirata, K ^a,b   Suzuki, R ^b   Ohdaira, T ^b   Mikado, T ^b  

^a NATL INST OF MAT AND CHEM RES   (Japan)

^b ELECTROTECHNICAL LABORATORY   (Japan)

^c WASHINGTON STATE UNIVERSITY   (United States)

Author keywords

Free volume voids; PECVD silicon oxide films; Slow positrons

Indexed keywords

INFRARED SPECTROSCOPY; MONOMERS; PLASMA DEVICES; POSITRONS;

OXYGEN PRESSURES;

SILICON COMPOUNDS;

OXIDE; SILICON; SILOXANE;

CHEMICAL INTERACTION; CONFERENCE PAPER; FILM; INFRARED SPECTROSCOPY; INTERMETHOD COMPARISON; LIFESPAN; OXYGEN TENSION; POSITRON; POSITRONIUM; STRUCTURE ANALYSIS;

EID: 0035088454     PISSN: 0969806X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0969-806X(00)00400-X     Document Type: Conference Paper

References (16)

1. Oxygen barrier efficiency of hexamethyldisiloxane/oxygen plasma-deposited coating
2. Post-deposition aging reactions differ markedly between plasma polymers deposited from siloxane and silazane monomers
3. Low-k films prepared by plasma-enhanced chemical vapor deposition from tetramethylsilane
4. Positron annihilation and ESR study of irradiation-induced defects in silica glass
5. Plasma-polymerized organosiloxane thin films as selective gas sensors
6. Quantitative analysis of the effect of disorder-induced mode coupling on infrared absorption in silica
7. Critical investigation of the infrared-transmission-data analysis of hydrogenated amorphous silicon alloys
8. Residual stress and thermal expansion coefficient of plasma polymerized films
9. Effect of the hydrogen on the intrinsic stress in a-C: H films deposited from an electron cyclotron resonance plasma
10. Emission actinometric investigations of atomic hydrogen and CH radicals in plasma- enhanced chemical vapor deposition processes of hexamethyldisiloxane
11. An intense pulsed positron beam
12. Free-volume distribution and positronium formation in amorphous polymers: Temperature and positron-irradiation-time dependence
13. Plasma-polymerized hexamethyldisiloxane films characterized by variable-energy positron lifetime spectroscopy
14. Variable-energy positron lifetime spectroscopy study of silicon-oxide films plasma-deposited from hexamethyldisiloxane and oxygen mixtures
15. 2