Characterization of atomic-size metal ion sources

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 1, 2001, Pages 79-86

  Purcell, S T ^a   Binh, Vu Thien ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTRON EMISSION; ION BEAMS; MATHEMATICAL MODELS; QUANTUM THEORY; ULTRAHIGH VACUUM;

ATOMIC-SIZE ION SOURCES (ASIS); FIELD DESORPTION THEORY; NANOTIPS;

ION SOURCES;

EID: 0035082046     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1343097     Document Type: Article

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