Microguns with 100-V electron beams

Applied Physics Letters

Volumn 73, Issue 14, 1998, Pages 2048-2050

  Binh, Vu Thien ^a   Semet, V ^a   Guillot, D ^a   Legagneux, P ^b   Pribat, D ^b  

^a UNIVERSITÉ LYON 1   (France)

^b THALES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000120164     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.122363     Document Type: Article

References (7)

1. T. H. P. Chang, D. P. Kern, and L. P. Murray, J. Vac. Sci. Technol. B 6, 1698 (1990).
2. For a review, see T. H. P. Chang, M. G. R. Thomson, E. Kratschmer, H. S. Kim, K. Y. Lee, S. A. Rishton, B. W. Hussey, and S. Zolgharnain, J. Vac. Sci. Technol. B 14, 3774 (1996).
3. V. T. Binh, N. Garcia, and S. T. Purcell, Advances in Imaging and Electron Physics (Academic, New York, 1996), Vol. 95, Chap. 2, p. 63;
4. V. T. Binh and S. T. Purcell, Appl. Surf. Sci. 111, 157 (1997).
5. D. Pribat, V. T. Binh, and P. Legagneux; Patent No. 90 14287 16, Nov. 1990.
6. P. Legagneux, D. Pribat, V. T. Binh, V. Semet, D. Guillot, and S. T. Purcell, MRS 1998 Spring meeting, 13-17 April 1998, San Francisco, CA.
7. V. T. Binh and V. Semet, Ultramicroscopy 73, 107 (1998).