Development of a high brightness gas field ion source

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2365-2368

  Edinger, Klaus ^a   Yun, Victor ^a   Melngailis, John ^a   Orloff, Jon ^a   Magera, Gerald ^b  

^a UNIVERSITY OF MARYLAND   (United States)

^b Thermo Fisher Scientific   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346223095     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589648     Document Type: Article

References (10)

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