New type of metal ion source: surface diffusion Li+ ion source

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 13, Issue 2, 1995, Pages 621-624

  Medvedev, V K ^a   Suchorski, Yu ^a   Block, J H ^a  

^a FRITZ HABER INSTITUT DER MAX PLANCK GESELLSCHAFT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; DESORPTION; DIFFUSION; GEOMETRY; ION BEAMS; LITHIUM; MULTILAYERS; NANOTECHNOLOGY;

ADATOMS; FULL WIDTH AT HALF MAXIMUM; TUNGSTEN FIELD EMITTER;

ION SOURCES;

EID: 0029277895     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.587927     Document Type: Article

References (18)