Design of radial line slot antennas at 8.3 GHz for large area uniform plasma generation

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 4 A, 1999, Pages 2082-2088

  Yamamoto, Tetsuya ^a   Chien, Nguyen Thang ^a   Ando, Makoto ^a   Goto, Naohisa ^b   Hirayama, Masaki ^c   Ohmi, Tadahiro ^c  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b TAKUSHOKU UNIVERSITY   (Japan)

^c TOHOKU UNIVERSITY   (Japan)

Author keywords

Ion flux; Planar waveguide; Plasma density; Plasma process; Radial line slot antenna

Indexed keywords

EID: 0001220082     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.2082     Document Type: Article

References (10)

1. N. Goto and M. Yamamoto: Inst. Electr. Commun. Eng. Tech. Rep. AP80-57 (1980) 43 [in Japanese].
2. M. Takahashi, J. Takada, M. Ando and N. Goto: Proc. Inst. Electr. Eng. 139 (1992) No. 1, 79.
3. J. Hirokawa, J. Takada, M. Ando and N. Goto: Proc. Inst. Electr. Eng. 137 (1990) No. 5, 249.
4. T. Ohmi: Preface in New Era of Semiconductor Manufacturing I, Ultra Clean Technol. 9 (1997) Suppl. 1.
5. M. Hirayama and T. Ohmi: Proc. 30th Symp. ULSI Ultra Clean Technol. (1997) p. 51.
6. M. Takahashi, M. Ando, N. Goto N. Ishii and K. Imahashi: Spring Natl. Conv. Rec.: Inst. Electr. Inf. Commun. Eng. B 65 (1993) p. 65 [in Japanese].
7. Y. Kobayashi, N. Goto, M. Ando, M. Takahashi, T. Yamamoto, S. Kuwabara, N. Ishii and Y. Horiike: Ext. Abstr. (Fall Meet. 1995); Japan Society of Applied Physics, 27p-M-14 [in Japanese].
8. T. Yamamoto, M. Ando, N. Goto N. Ishii, M. Takahashi and Y. Horiike: Fall Natl. Conv. Rec. 1995; Inst. Electr. Inf. Commun. Eng. B 27 (1995) p. 27 [in Japanese].
9. F. F. Chen: Introduction to Plasma Physics (Plenum Press, New York, 1974).
10. A. Akiyama, T. Yamamoto, M. Ando and N. Goto: Inst. Electr. Eng. Proc. Microwave Antennas Propag. 145 (1998) 1.