Production of large-diameter plasma using multi-slotted planar antenna

Plasma Sources Science and Technology

Volumn 8, Issue 4, 1999, Pages 530-533

  Yasaka, Y ^a   Nozaki, D ^a   Koga, K ^a   Ando, M ^b   Yamamoto, T ^b   Goto, N ^c   Ishii, N ^d   Morimoto, T ^d  

^a KYOTO UNIVERSITY   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^c TAKUSHOKU UNIVERSITY   (Japan)

^d TOKYO ELECTRON LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNA RADIATION; ARGON; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; MICROWAVE ANTENNAS; PLASMA DENSITY; RESONANCE; SLOT ANTENNAS;

MICROWAVE DISCHARGES; MULTISLOTTED PLANAR ANTENNAS;

PLASMA SOURCES;

EID: 0033345004     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/8/4/302     Document Type: Article

References (5)

1. Sato N, Iizuka S, Nakagawa Y and Tsukada T 1993 Appl. Phys. Lett. 62 1469
2. Shida N, Inoue T, Kokai H, Sakamoto Y, Miyasawa W, Den S and Hayashi Y 1993 Japan. J. Appl. Phys. 32 L1635
3. Yasaka Y and Nakamura T 1996 Appl. Phys. Lett. 72 1476
4. Takahashi M, Takada J, Ando M and Goto N 1991 IEEE Trans. Antennas and Propagation 39 954
5. Ginzburg V 1964 The Propagation of Electromagnetic Waves in Plasmas (Oxford: Pergamon)