Overview of novel approaches for laser microfabrication of advanced materials

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4157, Issue , 2001, Pages 149-157

  Sugioka, K ^a  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

Advanced materials; F2 laser; Femtosecond laser; Hybrid laser processing; Laser ablation; Laser processing; Microfabrication; Micromachining; Modification

Indexed keywords

DIAMONDS; FUSED SILICA; GALLIUM NITRIDE; GAS LASERS; INFRARED RADIATION; LASER ABLATION; MICROMACHINING; MICROSTRUCTURE; QUARTZ; SAPPHIRE; SILICON CARBIDE; ULTRAFAST PHENOMENA; ULTRAVIOLET RADIATION;

HYBRID LASER PROCESSING; LASER MICROFABRICATION;

LASER APPLICATIONS;

EID: 0035049596     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.413749     Document Type: Conference Paper

References (24)