Ablation of fused quartz by ultraviolet, visible or infrared laser coupled with VUV laser

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 35, Issue 11 PART A, 1996, Pages

  Zhang, Jie ^a,b   Sugioka, Koji ^a   Wada, Satoshi ^a   Tashiro, Hideo ^a   Toyoda, Koichi ^a  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^b INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

Fused quartz; Laser ablation; SPM

Indexed keywords

ABSORPTION; BAND STRUCTURE; LASER ABLATION; LASER PULSES; MICROSCOPIC EXAMINATION; MORPHOLOGY; NEODYMIUM LASERS; Q SWITCHED LASERS; SCANNING; SURFACE ROUGHNESS; ULTRAVIOLET RADIATION;

FUSED QUARTZ; SCANNING PROBE MICROSCOPY (SPM); SINGLE WAVELENGTH ABLATION; VACUUM ULTRAVIOLET (VUV) LASER;

QUARTZ;

EID: 0030285472     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.l1422     Document Type: Article

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